COMPLIANCE DETERMINATION WORKSHEET (Completion required for all operations that exist in fab area source)
Photoresist Operations Using Solvent-Based Developer Requirements
Is solvent-based developer applied by any method other than by immersion in a solvent sink? If no, go to
next section.
Are all exhaust gases containing VOC from both the solvent-based photoresist application and solvent-
based developer operations in the fab area vented to an approved emission control device which captures
and abates at least 90% (by weight) of VOC evaporated at the application and development operations?
(8-30-302)
Is total combined net consumption of solvent-based photoresist and solvent-based developer less than 24
gallons per month? (8-30-402)
Solvent Sink Requirements
Do all solvent sinks containing VOC have a cover? (8-30-304.1)
If no (all solvent sinks do not have a cover), are all uncovered solvent sinks containing VOC abated by an
approved emission control device? (8-30-304.2; 8-30-304.5)
Is the capacity of all solvent sinks clearly labeled on the sink (8-30-304.2)
Are all materials containing VOC, including waste solvents, stored or disposed in a manner so as not to
allow evaporation into the atmosphere? (8-30-304.3)
Are liquid solvent leaks repaired immediately or the equipment shut down (8-30-304.4)
Are there any unheated solvent sinks with a vapor pressure higher than 30 mmHg at 20 degrees C, OR
any heated sinks with a freeboard ratio
1
less than 0.75? (8-30-304.5)
If yes, are there any such sinks with capacity greater than 1 liter? (8-30-304.5.1)
If yes (greater than 1 liter), are all such sinks abated by an approved emission control device.(8-30-304.2;
8-30-304.5.2)
1.
The vertical distance from the top of the evaporative area to the bottom of the lowest opening in the solvent cleaner
(freeboard height) divided by the smaller of the length or width of the solvent cleaner evaporative area.
Solvent Spray Station Requirements
Does the station(s) operate as a sealed enclosure unless sampling, maintenance, loading or unloading
procedures require operator access. (8-30-305.1)
If no (station is not a sealed enclosure), is station abated by an approved emission control device which
captures and abates at least 90% (by weight) of VOC emitted from station? (8-30-305.1)
Are liquid solvent leaks repaired immediately or the equipment shut down (8-30-305.2)
Does station have VOC emissions that exceed 250 lb/month per station, as calculated in accordance with
8-30-504?
If yes (station’s VOC emissions exceeds 250 lb/month), does an approved emission control device abate
station? (8-30-305.3)
Solvent Vapor Station Requirements
Does the station(s) operate as a sealed enclosure unless sampling, maintenance, loading or unloading
procedures require operator access. (8-30-306.1)
If no (station is not a sealed enclosure), is station abated by an approved emission control device which
captures and abates at least 90% (by weight) of VOC emitted from station? (8-30-306.1)
Are liquid solvent leaks repaired immediately or the equipment shut down (8-30-306.2)
Does station have VOC emissions that exceed 250 lb/month per station, as calculated in accordance with
8-30-504?
If yes (station’s VOC emissions exceeds 250 lb/month), does an approved emission control device abate
station? (8-30-306.3)
